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      COMPONENTS      PUMPS      GAUGES      MFC      VALVES      FEEDTHROUGHS      DEPOSITION      MATERIALS      CHAMBERS      SYSTEMS

Cryogenic Pumps

Have the advantage of hydro-carbon free high vacuum for multiple applications including sputtering.

Full monitoring and control options, with oil and vibration free operation.

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Vacuum
Pumps
 Diaphragm

Diaphragm Pumps

Offering smaller pumping speeds and ultimate pressures, with comparatively low operative noise.

Suitable for non-corrosive and oil-free applications.

 Diffusion

Diffusion Pumps

With high pumping speeds and throughput, achieving low ultimate pressures, and giving long-term reliability.

Suitable for a variety of industrial and research applications.

 Ion

Ion Pumps

Wide range of configurable pumping speeds, types and sizes available with controllers and accessories.

Optimized element cess and ceramic insulators giving long pump life.

 Roots

Roots Pumps

Range of pumping speeds suitable for semiconductor industry, research and development, metallurgy and chemical processes.

Suitable for all low and medium vacuum applications.

 Rotary

Rotary Vane Pumps

Capable of delivering low or high throughput whilst achieving a high ultimate pressure.

Well suited as a backing pump and for use with a wide range of applications.

 Scroll

Scroll Pumps

Ideal for use as an alternative backing pump to rotary offering a variety of pumping speeds and capacity.

Durable and reliable oil free operation for clean applications.

 Turbo

Turbomolecular Pumps

A large range of pumping speeds for a broad spectrum of applications, achieving high ultimate pressure.

Full monitoring and control options, with oil and vibration free operation.



 


   Cryogenic Vacuum Pumps    Diaphragm Vacuum Pumps    Diffusion Vacuum Pumps   Ion Vacuum Pumps     Roots Vacuum Pumps    Rotary Vacuum Pumps    Scroll Vacuum Pumps    Turbo Vacuum Pumps

 

 

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